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MSD Series Sputtering Power Supply

Lus piav qhia luv luv:

MSD series DC sputtering fais fab mov txais lub tuam txhab cov tub ntxhais DC tswj kev ua ke nrog cov txheej txheem ua haujlwm zoo arc, kom cov khoom muaj kev ua haujlwm ruaj khov, cov khoom lag luam siab, kev puas tsuaj me me thiab cov txheej txheem rov ua haujlwm zoo.Txais Suav thiab Askiv zaub interface, yooj yim rau kev khiav lag luam.


Product Detail

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Nta

● Rack installation

● Fast arc teb, teb lub sij hawm <100ns

● Hauv qab lub zog cia, <1mJ/kW

● Compact installation qauv, 3U txheem chassis

● Suav/English zaub interface, yooj yim rau kev khiav lag luam

● Precise tswj

● Ntau yam ntawm cov zis

● Kev tiv thaiv zoo meej muaj nuj nqi

Product Detail

Tswv yim Tawm tswv yim voltage: 3AC380V ± 10%
Lub Zog: 20kW, 30kW

Input zog zaus: 50Hz / 60Hz

Tso zis Max.Cov zis hluav taws xob: 800V
Max.Cov zis tam sim no: 50A, 75A
Cov zis tam sim no ripple: ≤3% rms
Cov zis Voltage Ripple: ≤2% rms
Technical Performance index Ignition voltage: 1000V / 1200V yeem
Conversion efficiency: 95%
Arc tawm lub sijhawm: 100ns
Kev sib txuas lus interface: Standard RS485 / RS232 (PROFIBUS, PROFINET, DeviceNet thiab EtherCAT yog xaiv tau)
Qhov Loj (H * W * D) mm: 132 * 482 * 560: 176 * 482 * 700
Txias hom: cua txias
Nco tseg: cov khoom lag luam txuas ntxiv tsim kho tshiab thiab kev ua haujlwm txuas ntxiv txhim kho.Cov lus piav qhia parameter no tsuas yog siv rau kev siv xwb.


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