MSD Series Sputtering Power Supply
Nta
● Rack installation
● Fast arc teb, teb lub sij hawm <100ns
● Hauv qab lub zog cia, <1mJ/kW
● Compact installation qauv, 3U txheem chassis
● Suav/English zaub interface, yooj yim rau kev khiav lag luam
● Precise tswj
● Ntau yam ntawm cov zis
● Kev tiv thaiv zoo meej muaj nuj nqi
Product Detail
Tswv yim | Tawm tswv yim voltage: 3AC380V ± 10% |
Lub Zog: 20kW, 30kW Input zog zaus: 50Hz / 60Hz | |
Tso zis | Max.Cov zis hluav taws xob: 800V |
Max.Cov zis tam sim no: 50A, 75A | |
Cov zis tam sim no ripple: ≤3% rms | |
Cov zis Voltage Ripple: ≤2% rms | |
Technical Performance index | Ignition voltage: 1000V / 1200V yeem |
Conversion efficiency: 95% | |
Arc tawm lub sijhawm: 100ns | |
Kev sib txuas lus interface: Standard RS485 / RS232 (PROFIBUS, PROFINET, DeviceNet thiab EtherCAT yog xaiv tau) | |
Qhov Loj (H * W * D) mm: 132 * 482 * 560: 176 * 482 * 700 | |
Txias hom: cua txias | |
Nco tseg: cov khoom lag luam txuas ntxiv tsim kho tshiab thiab kev ua haujlwm txuas ntxiv txhim kho.Cov lus piav qhia parameter no tsuas yog siv rau kev siv xwb. |
Sau koj cov lus ntawm no thiab xa tuaj rau peb