MSD Series Sputtering Power Supply

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MSD series DC sputtering fais fab mov txais lub tuam txhab cov tub ntxhais DC tswj kev ua ke nrog cov txheej txheem ua haujlwm zoo arc, kom cov khoom muaj kev ua haujlwm ruaj khov, cov khoom lag luam siab, kev puas tsuaj me me thiab cov txheej txheem rov ua haujlwm zoo.Txais Suav thiab Askiv zaub interface, yooj yim rau kev khiav lag luam.

Product Detail

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Nta

● Rack installation
● Fast arc teb, teb lub sij hawm <100ns
● Hauv qab lub zog cia, <1mJ/kW
● Compact installation qauv, 3U txheem chassis
● Suav/English zaub interface, yooj yim rau kev khiav lag luam
● Precise tswj
● Ntau yam ntawm cov zis
● Kev tiv thaiv zoo meej muaj nuj nqi

Product Detail

Tswv yim	Tawm tswv yim voltage: 3AC380V ± 10%
Tswv yim	Lub zog: 20kW, 30kWinput zog zaus: 50Hz / 60Hz
Tso zis	Max.Cov zis hluav taws xob: 800V
	Max.tso zis tam sim no: 50A, 75A
	Cov zis tam sim no ripple: ≤3% rms
	Cov zis Voltage Ripple: ≤2% rms
Technical Performance index	Ignition voltage: 1000V / 1200V yeem
	Conversion efficiency: 95%
	Arc tawm lub sijhawm: 100ns
	Kev sib txuas lus interface: Txheem RS485 / RS232 (PROFIBUS, PROFINET, DeviceNet thiab EtherCAT yog xaiv tau)
	Qhov Loj (H * W * D) mm: 132 * 482 * 560: 176 * 482 * 700
	Txias hom: cua txias
Nco tseg: cov khoom lag luam txuas ntxiv tsim kho tshiab thiab kev ua haujlwm txuas ntxiv txhim kho.Qhov no parameter piav qhia yog rau siv xwb.