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MSB Series Medium Frequency Sputtering Fais Fab Supply

Lus piav qhia luv luv:

MSB Series tso siab rau nws qhov zoo tshaj plaws waveform modulation thev naus laus zis los tso tawm DC, DC pulse, bidirectional square yoj, bidirectional trapezoidal yoj thiab lwm yam waveform.Cov khoom muaj adjustable tso zis waveform, selectable tso zis zaus, adjustable lub luag hauj lwm voj voog, thiab meej hwj chim tswj.Ntxiv rau qhov qis zog cia thiab ceev arc teb.Muab kev tswj kom yooj yim thiab meej rau cov txheej txheem txheej.Cov khoom no tsuas yog siv nyob rau hauv ntau yam nyias zaj duab xis manufacturing txheej txheem, kev lag luam hnub ci cell, thiab lub tshuab nqus tsev txheej kev lag luam;Daim ntawv thov txheej txheem: magnetron sputtering txheej txheem, ntxaib lub hom phiaj sputtering, thiab tubular PECVD.


Product Detail

Khoom cim npe

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Nta

Rack installation
Fast arc teb, teb lub sij hawm <100ns
Tsawg zog cia, <0.5mJ/KW
Multi-phase interleaved PFC thev naus laus zis, lub zog muaj zog yog siab li 0.95
Ntau hom tso zis ntau hom, nruam thiab sib cuam tshuam hom tuaj yeem xaiv
Inverter Circuit Court txais tag nrho cov khoom siv hloov pauv thiab siv cov khoom siv thib peb-tiam SiC ua cov cuab yeej hluav taws xob, nrog kev ua haujlwm zoo heev.
Qhov tseeb arc nrhiav pom, ntau txoj kev saib xyuas muaj

Product Detail

Index MSB 1040 (20 * 2) MSB 1030

 

Tswv yim
Input voltage

 

3AC400V, 50/60Hz

 

3AC400V, 50/60Hz

 

Qib zog

 

20 kWm

 

30 kwv

 

Tso zis hom

 

2 channel

 

1 channel

 

Tso zis
Maximum tso zis tam sim no

 

50A * 2

 

80 A

 

Maximum tso zis voltage

 

600V * 2

 

600 V

 

Technical ntsuas
Fais fab xwm txheej

 

0.95 ib

 

0.95 ib

 

Conversion efficiency

 

94% Nyob rau hauv rated xeev 94% Nyob rau hauv rated xeev
Kho qhov tseeb

 

± 0.5%

 

± 0.5%

 

Arc teb lub sijhawm

 

<100 ns

 

<100 ns

 

Loj

 

4U

 

4U

 

Kev sib txuas lus

 

Txheem RS485 / RS232 (Profibus, Profinet, DeviceNET, EtherCAT yeem)


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