MSB Series Medium Frequency Sputtering Fais Fab

MSB Series Medium Frequency Sputtering Power Supply Featured duab

Lus piav qhia luv luv:

RHH series RF fais fab mov tso siab rau kev paub tab RF tiam technology los muab cov neeg siv khoom nrog RF fais fab mov nrog lub zog ntau dua, siab dua thiab cov lus teb ceev.Nrog theem tuaj yeem teeb tsa, mem tes tswj tau, digital tuning thiab lwm yam haujlwm.Muaj feem xyuam: kev lag luam photovoltaic, vaj huam sib luag vaj huam sib luag tso saib kev lag luam, kev lag luam semiconductor, tshuaj lom neeg kev lag luam, chav kuaj, kev tshawb fawb, kev tsim khoom, thiab lwm yam.

Cov txheej txheem siv tau: plasma enhanced chemical vapor deposition (PECVD), plasma etching, plasma cleaning, radio frequency ion source, plasma diffusion, plasma polymerization sputtering, reactive sputtering, etc.

Product Detail

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Nta

● Ib nrab-cib thiab khib mount style

● Txais kev tswj hwm digital tag nrho, nrog cov ntawv qhia ua haujlwm yooj yim thiab nplua nuj

● Zaus tuning, mem tes thiab mem tes synchronization ua haujlwm

● Nrog CEX theem synchronization muaj nuj nqi

● Kev tiv thaiv zoo meej muaj nuj nqi

Product Detail

Tswv yim	Input voltage: AC220V ± 10% 3ΦAC380V ± 5% (Tshwj xeeb tshwj xeeb tuaj yeem kho)
Tswv yim	Input zaus: 47 ~ 63Hz
Tso zis	Cov zis zaus: 13.56MHz, 27.12MHz, 40.68MHz
	Kev hloov pauv ntau: ± 5%
	Cov zis hluav taws xob: 1.5 ~ 5kW
	Kev tswj ntau ntawm cov zis hluav taws xob: 1 ~ 100%
	Cov zis impedance: 50Ω + j0
	Output interface: hom N
	Cov zis hom: nruam, mem tes
	Pulse zaus: 100Hz ~ 100kHz
	Lub luag haujlwm: 5 ~ 95%
Performance index	Lub zog muaj zog: 0.98
	Kev ruaj ntseg qhov tseeb: ± 0.005%
	Efficiency: 75% (ntawm cov zis tawm)
	Harmonic: ＜-45dBc
	Txoj kab uas hla: ＜-50dBc
	Sab nraud tswj interface: analog kom muaj nuj nqis, kev sib txuas lus thiab synchronization
	Kev sib txuas lus hom: Txheem RS485 kev sib txuas lus interface;Yeem Ether CAT, muaj Ethernet, thiab lwm yam.
Nco tseg: cov khoom lag luam txuas ntxiv tsim kho tshiab thiab kev ua haujlwm txuas ntxiv txhim kho.Cov lus piav qhia parameter no tsuas yog siv rau kev siv xwb.