Microwave hloov fais fab mov yog hom tshiab ntawm microwave fais fab mov raws li IGBT high zaus inverter technology.Nws koom ua ke anode high voltage fais fab mov, filament fais fab mov thiab magnetic teb fais fab mov (tshwj tsis yog 3kW microwave fais fab mov).Lub yoj magnetron muab kev ua haujlwm.Cov khoom no yog siv hauv MPCVD, microwave plasma etching, microwave plasma degumming thiab lwm yam.